The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2023
Filed:
Apr. 02, 2021
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/414 (2006.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01); B01L 3/00 (2006.01); G01N 33/543 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4145 (2013.01); B01L 3/502715 (2013.01); G01N 33/54373 (2013.01); G03F 7/0035 (2013.01); G03F 7/20 (2013.01); B01L 3/502707 (2013.01); B01L 2200/12 (2013.01); B01L 2300/0636 (2013.01); B01L 2300/0645 (2013.01); B01L 2300/0819 (2013.01); B01L 2300/0887 (2013.01);
Abstract
A biochip including a fluidic substrate having an opening extending completely through the fluidic substrate. The biochip further includes a silicon oxide coating on the fluidic substrate. The biochip further includes a plurality of sidewalls on the fluidic substrate, wherein the plurality of sidewalls defines a channel in fluid communication with the opening, the silicon oxide coating is between adjacent sidewalls of the plurality of sidewalls, and each of the plurality of sidewalls comprises polydimethylsiloxane (PDMS). The biochip further includes a detection substrate spaced from the fluidic substrate.