The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Mar. 29, 2016
Asml Netherlands B.v., Veldhoven, NL;
Güneş Nak{dot over (i)}boğlu, Eindhoven, NL;
Maarten Holtrust, Eindhoven, NL;
Martinus Van Duijnhoven, Deurne, NL;
Francis Fahrni, Eindhoven, NL;
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
Anne Willemijn Bertine Quist, Eindhoven, NL;
Bart Dinand Paarhuis, Waalre, NL;
Daan Daniel Johannes Antonius Van Sommeren, Beuningen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus has: a conduit through which a gas can flow; a gas mover configured to cause the gas to flow in the conduit; a wall in contact with the gas in the conduit and defining a membrane aperture therein; and an acoustic filter including a flexible membrane fixed in the membrane aperture. The acoustic filter reduces transmission of acoustic disturbances without adding any flow resistance.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile