The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Nov. 03, 2020
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Takayuki Fujiwara, Joetsu, JP;
Kenichi Oikawa, Joetsu, JP;
Tomohiro Kobayashi, Joetsu, JP;
Masahiro Fukushima, Joetsu, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); C07C 69/92 (2006.01); C07C 381/12 (2006.01); C07D 333/76 (2006.01); C07C 25/18 (2006.01); C07C 69/96 (2006.01); C08F 220/28 (2006.01); C08F 220/18 (2006.01); C08F 212/14 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 25/18 (2013.01); C07C 69/92 (2013.01); C07C 69/96 (2013.01); C07C 381/12 (2013.01); C07D 333/76 (2013.01); C08F 212/24 (2020.02); C08F 220/1809 (2020.02); C08F 220/283 (2020.02); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01); G03F 7/0397 (2013.01); C07C 2601/08 (2017.05); C07C 2601/14 (2017.05); C07C 2603/74 (2017.05);
Abstract
An onium salt having formula (1) serving as an acid diffusion inhibitor and a chemically amplified resist composition comprising the acid diffusion inhibitor are provided. When processed by lithography, the resist composition exhibits dissolution contrast, acid diffusion suppressing effect, and excellent lithography performance factors such as CDU, LWR and sensitivity.