The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
May. 31, 2022
Applicants:
Tokyo Electron Limited, Tokyo, JP;
Avaldata Corporation, Tokyo, JP;
Inventors:
Tomoya Bessho, Yamanashi, JP;
Shiro Hayashi, Iwate, JP;
Junichi Harada, Yamanashi, JP;
Akitsugu Noguchi, Tokyo, JP;
Assignees:
Tokyo Electron Limited, Tokyo, JP;
AVALDATA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/40 (2020.01); G01R 31/42 (2006.01); G01R 31/317 (2006.01); G01R 31/30 (2006.01); G01R 31/52 (2020.01); G01R 31/34 (2020.01);
U.S. Cl.
CPC ...
G01R 31/42 (2013.01); G01R 31/3004 (2013.01); G01R 31/31721 (2013.01); G01R 31/40 (2013.01); G01R 31/343 (2013.01); G01R 31/52 (2020.01);
Abstract
An abnormality detection method according to one aspect of the present disclosure is a method of detecting an abnormality in an AC signal to be input from an AC power supply. The method includes, where an ideal AC signal is represented as Vsin ωt (V: amplitude, co: angular frequency, t: time), calculating an arithmetic value including a value represented by sinωt+cosωt and determining that the AC signal is abnormal when the arithmetic value is out of a threshold range.