The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Sep. 20, 2019
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Robert Wright, Jr., Newtown, CT (US);
Thomas H. Baum, New Fairfield, CT (US);
Bryan C. Hendrix, Danbury, CT (US);
Shawn D. Nguyen, Danbury, CT (US);
Han Wang, Cromwell, CT (US);
Philip S. H. Chen, Bethel, CT (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/18 (2006.01); H01L 21/02 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45534 (2013.01); C23C 16/18 (2013.01); C23C 16/56 (2013.01); H01L 21/0228 (2013.01);
Abstract
Described are vapor deposition methods for depositing metal films or layers onto a substrate, wherein the metal is molybdenum or tungsten; the methods involve organometallic precursor compounds that contain the metal and one or more carbon-containing ligands, and include depositing a metal layer formed from the metal of the precursor, onto a substrate, followed by introducing oxidizer to the formed metal layer.