The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2023
Filed:
Jul. 27, 2018
Applicant:
Adeka Corporation, Tokyo, JP;
Inventors:
Tomoharu Yoshino, Tokyo, JP;
Masaki Enzu, Tokyo, JP;
Nana Okada, Tokyo, JP;
Masako Hatase, Tokyo, JP;
Assignee:
ADEKA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F 15/00 (2006.01); C23C 16/18 (2006.01); C23C 16/455 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C07F 15/0046 (2013.01); C23C 16/18 (2013.01); C23C 16/45525 (2013.01); C23C 16/45553 (2013.01); H01L 21/28556 (2013.01); H01L 21/28568 (2013.01);
Abstract
A ruthenium compound represented by a general formula described in the specification, a raw material which is for forming a thin film and which contains the ruthenium compound, and a method of producing a thin film using the raw material for forming a thin film are provided.