The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2023

Filed:

Jul. 16, 2021
Applicant:

Ev Group E. Thallner Gmbh, St. Florian am Inn, AT;

Inventors:

Thomas Wagenleitner, Aurolzmunster, AT;

Andreas Fehkuhrer, Senftenbach, AT;

Assignee:

EV Group E. Thallner GmbH, St. Florian am Inn, AT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/67 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/2007 (2013.01); B81C 1/00269 (2013.01); H01L 21/67092 (2013.01);
Abstract

A method and device for bonding a first substrate with a second substrate inside a sealed bonding chamber. The method includes: a) fixing of the first and second substrates, b) arranging of the first and second substrates, c) mutual approaching of the first and second substrates, d) contacting the first and second substrates at respective bond initiation points, e) generating a bonding wave running from the bond initiation points to side edges of the substrates, and f) influencing the bonding wave during course of the bonding wave, wherein targeted influencing of the bonding wave takes place by a regulated and/or controlled change of pressure inside the bonding chamber.


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