The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2023

Filed:

Nov. 24, 2020
Applicant:

Nova Ltd., Rehovot, IL;

Inventors:

Elad Schleifer, Rehovot, IL;

Yonatan Oren, Rehovot, IL;

Amir Shayari, Rehovot, IL;

Eyal Hollander, Ramat Hasharon, IL;

Valery Deich, Rehovot, IL;

Shimon Yalov, Rehovot, IL;

Gilad Barak, Rehovot, IL;

Assignee:

Nova Ltd., Rehovot, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/44 (2006.01); G01N 21/65 (2006.01); G01J 3/02 (2006.01);
U.S. Cl.
CPC ...
G01N 21/65 (2013.01); G01J 3/0205 (2013.01); G01J 3/027 (2013.01); G01J 3/4412 (2013.01); G01N 2201/0636 (2013.01); G01N 2201/06113 (2013.01);
Abstract

A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.


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