The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2023
Filed:
Jul. 29, 2021
Hitachi High-tech Corporation, Tokyo, JP;
Takayasu Iwatsuka, Tokyo, JP;
Tomoyo Sasaki, Tokyo, JP;
Wen Li, Tokyo, JP;
Ryo Kadoi, Tokyo, JP;
Makoto Suzuki, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
To provide a technique capable of measuring high-frequency electrical noise in a charged particle beam device. A charged particle beam deviceincludes an electron sourcefor generating an electron beam EB, a stagefor mounting a sample, a detectorfor detecting secondary electrons EBemitted from the sample, and a control unitelectrically connected to the electron source, the stage, and the detectorand can control the electron source, the stage, and the detector. Here, when the sampleis mounted on the stage, and a specific portionof the sampleis continuously irradiated with the electron beam EBfrom the electron source, the control unitcan calculate a time-series change in irradiation position of the electron beam EBbased on an amount of the secondary electrons EBemitted from the specific portion, and can calculate a feature quantity for a shake of the electron beam EBbased on the time-series change in irradiation position. Further, the feature quantity includes a frequency spectrum.