The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2023

Filed:

Jul. 08, 2021
Applicant:

Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);

Inventors:

Charlotte A. Cutler, Hopkinton, MA (US);

Li Cui, Westborough, MA (US);

Shintaro Yamada, Shrewsbury, MA (US);

Paul J. LaBeaume, Auburn, MA (US);

Suzanne M. Coley, Mansfield, MA (US);

James F. Cameron, Brookline, MA (US);

Daniel Greene, Pendleton, KY (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); G03F 7/11 (2006.01); G03F 7/16 (2006.01); G03F 7/32 (2006.01); G03F 7/20 (2006.01); G03F 7/42 (2006.01); C08F 230/08 (2006.01); C09D 143/04 (2006.01); C08F 220/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0752 (2013.01); C08F 230/08 (2013.01); C08F 230/085 (2020.02); G03F 7/11 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/20 (2013.01); G03F 7/322 (2013.01); G03F 7/423 (2013.01); C08F 220/1804 (2020.02); C08F 2800/10 (2013.01); C09D 143/04 (2013.01);
Abstract

Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising a condensate and/or hydrolyzate of a polymer comprising as polymerized units one or more first unsaturated monomers having a condensable silicon-containing moiety, wherein the condensable silicon-containing moiety is pendent to the polymer backbone, and one or more condensable silicon monomers are provided.


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