The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2023
Filed:
Nov. 13, 2019
Applicant:
Kanto Kagaku Kabushiki Kaisha, Tokyo, JP;
Inventors:
Itsuki Kashiwagi, Tokyo, JP;
Takuo Ohwada, Tokyo, JP;
Assignee:
Kanto Kagaku Kabushiki Kaisha, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/30 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
C23F 1/30 (2013.01); H01L 21/32134 (2013.01);
Abstract
The present invention addresses the problem of providing a remover composition which can sufficiently remove ruthenium (Ru) remaining on substrates and can be inhibited from evolving RuOgas. The remover composition, which is for removing ruthenium remaining on substrates, has a pH at 25° C. of 8 or higher and includes one or more pH buffer ingredients.