The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Dec. 23, 2019
Applicant:
Asmpt Nexx, Inc., Billerica, MA (US);
Inventors:
I-Kuan Lin, Lexington, MA (US);
Arthur Sommerstein, Marblehead, MA (US);
Khanh Vo, Braintree, MA (US);
Kevin Barbera, Haverhill, MA (US);
Assignee:
ASMPT NEXX, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/687 (2006.01); B32B 7/12 (2006.01); B32B 27/12 (2006.01); B32B 27/08 (2006.01); B32B 27/28 (2006.01); B32B 5/02 (2006.01); B32B 37/12 (2006.01); B32B 3/08 (2006.01); B32B 37/00 (2006.01); B32B 38/18 (2006.01); B32B 7/06 (2019.01); B32B 37/08 (2006.01); B32B 38/10 (2006.01); B32B 7/14 (2006.01); B32B 37/06 (2006.01); B32B 3/26 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); B32B 3/085 (2013.01); B32B 3/266 (2013.01); B32B 5/02 (2013.01); B32B 7/06 (2013.01); B32B 7/12 (2013.01); B32B 7/14 (2013.01); B32B 27/08 (2013.01); B32B 27/12 (2013.01); B32B 27/281 (2013.01); B32B 37/025 (2013.01); B32B 37/06 (2013.01); B32B 37/08 (2013.01); B32B 37/12 (2013.01); B32B 38/10 (2013.01); B32B 38/1833 (2013.01); H01L 21/68742 (2013.01); B32B 2309/02 (2013.01); B32B 2309/12 (2013.01); B32B 2371/00 (2013.01); B32B 2377/00 (2013.01); B32B 2457/14 (2013.01);
Abstract
A method for applying raised features to a semiconductor substrate chuck, each feature acting to space a substrate from the chuck in use, the method comprising the steps of: