The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Nov. 25, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Shoichiro Matsuyama, Miyagi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32642 (2013.01); H01J 37/32724 (2013.01);
Abstract
An edge ring that is placed on an electrostatic chuck of a substrate processing apparatus so as to surround a periphery of a substrate is provided. Multiple contact portions are provided on a lower surface of the edge ring, and each of the contact portions is of a ring shape. Each of the contact portions is in line contact with a mounting surface of the electrostatic chuck.