The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Jan. 31, 2022
Axcelis Technologies, Inc., Beverly, MA (US);
Neil J. Bassom, Hamilton, MA (US);
Joshua Abeshaus, Haverhill, MA (US);
David Sporleder, Billerica, MA (US);
Neil Colvin, Merrimack, NH (US);
Joseph Valinski, Newmarket, NH (US);
Michael Cristoforo, Beverly, MA (US);
Vladimir Romanov, Danville, NH (US);
Pradeepa Kowrikan Subrahmnya, Thirthahalli, IN;
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.