The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2023
Filed:
Apr. 01, 2021
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Dirk Zeidler, Oberkochen, DE;
Thomas Korb, Schwaebisch Gmuend, DE;
Philipp Huethwohl, Ulm, DE;
Jens Timo Neumann, Aalen, DE;
Christof Riedesel, Aalen, DE;
Christian Wojek, Aalen, DE;
Joaquin Correa, Oakland, CA (US);
Wolfgang Hoegele, Stephanskirchen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A method, including: recording plural images of an object by scanning plural particle beams across the object and detecting signals generated by the particle beams, wherein the plural particle beams are generated by a multi-beam particle microscope; determining plural regions of interest; determining plural image regions in each of the recorded images; determining plural displacement vectors; and determining image distortions based on image data of the recorded images and the determined displacement vectors.