The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Aug. 30, 2019
Asml Netherlands B.v., Veldhoven, NL;
Raphael Nico Johan Stegen, Eindhoven, NL;
Erik Henricus Egidius Catharina Eummelen, Veldhoven, NL;
Christianus Wilhelmus Johannes Berendsen, Eindhoven, NL;
Theodorus Wilhelmus Polet, Geldrop, NL;
Giovanni Luca Gattobigio, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A process tool for processing production substrates, the process tool including: a movable stage configured to perform long-stroke movements in an X-Y plane; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position a part of a component to be inspected can be imaged by the imaging device.