The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2023
Filed:
Aug. 06, 2020
Infineon Technologies Ag, Neubiberg, DE;
Ralf Rieske, Dresden, DE;
Alexander Binter, Villach, AT;
Wolfgang Diewald, Villach, AT;
Bernhard Goller, Villach, AT;
Heimo Graf, Trebesing, AT;
Gerald Lackner, Arnoldstein, AT;
Jan Richter, Dresden, DE;
Roland Rupp, Lauf, DE;
Guenter Schagerl, Villach, AT;
Marko Swoboda, Dresden, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
Provided is a parent substrate that includes a central region and an edge region. The edge region surrounds the central region. A detachment layer is formed in the central region. The detachment layer extends parallel to a main surface of the parent substrate. The detachment layer includes modified substrate material. A groove is formed in the edge region. The groove laterally encloses the central region. The groove runs vertically and/or tilted to the detachment layer.