The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 25, 2023

Filed:

Sep. 23, 2019
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Chen-Yu Liu, Kaohsiung, TW;

Ching-Yu Chang, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 5/00 (2006.01); H01L 21/027 (2006.01); H01L 21/67 (2006.01); G03F 7/16 (2006.01); H01L 21/02 (2006.01); B05D 3/10 (2006.01); B05D 7/00 (2006.01); B05D 1/00 (2006.01);
U.S. Cl.
CPC ...
C09D 5/002 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); H01L 21/0271 (2013.01); H01L 21/6715 (2013.01); B05D 1/005 (2013.01); B05D 3/104 (2013.01); B05D 7/52 (2013.01); H01L 21/02118 (2013.01); H01L 21/02282 (2013.01);
Abstract

A coating technique and a priming material are provided. In an exemplary embodiment, the coating technique includes receiving a substrate and identifying a material of the substrate upon which a layer is to be formed. A priming material is dispensed on the material of the substrate, and a film-forming material is applied to the priming material. The priming material includes a molecule containing a first group based on an attribute of the substrate material and a second group based on an attribute of the film-forming material. Suitable attributes of the substrate material and the film-forming material include water affinity and degree of polarity and the first and second groups may be selected to have a water affinity or degree of polarity that corresponds to that of the substrate material and the film-forming material, respectively.


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