The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2023
Filed:
Aug. 16, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Alexander Hendrik Vincent Van Veen, Rotterdam, NL;
Willem Henk Urbanus, Delft, NL;
Marco Jan-Jaco Wieland, Delft, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/30 (2006.01); G21K 5/04 (2006.01); G21K 1/02 (2006.01); H01J 37/317 (2006.01); H01J 37/16 (2006.01); H01J 37/12 (2006.01);
U.S. Cl.
CPC ...
G21K 5/04 (2013.01); G21K 1/02 (2013.01); H01J 37/12 (2013.01); H01J 37/16 (2013.01); H01J 37/3007 (2013.01); H01J 37/3177 (2013.01); H01J 2237/002 (2013.01); H01J 2237/024 (2013.01); H01J 2237/0213 (2013.01); H01J 2237/0216 (2013.01); H01J 2237/0262 (2013.01); H01J 2237/032 (2013.01); H01J 2237/1207 (2013.01); H01J 2237/1215 (2013.01); H01J 2237/16 (2013.01); H01J 2237/1825 (2013.01); H01J 2237/30472 (2013.01);
Abstract
The disclosure relates to an electron-optical module of an electron-optical apparatus. The electron-optical module comprises a vacuum chamber, a high voltage shielding arrangement located within the vacuum chamber, and an aperture array configured to form a plurality of beamlets from an electron beam and located within the high voltage shielding arrangement. Wherein the electron-optical module can be configured to be removable from the electron-optical apparatus.