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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11703761 B1

PDFFull Text
Date of Patent:
Jul. 18, 2023

Filed:

Jul. 01, 2021

Temperature controlling apparatus

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Chi-Hung Liao, New Taipei, TW;

Wei-Chang Cheng, Taichung, TW;

Assignee:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Attorney:

JCIPRNET

Primary Examiner:

Mounir S Amer

Int. Cl.
CPC ...
H01L 29/739 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); G03F 7/09 (2006.01); G01K 13/02 (2021.01); H05B 3/22 (2006.01); H01L 21/3213 (2006.01); G03F 7/30 (2006.01); G03F 7/16 (2006.01); H01L 21/67 (2006.01); G03F 7/095 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G03F 7/094 (2013.01); G01K 13/02 (2013.01); G03F 7/095 (2013.01); G03F 7/16 (2013.01); G03F 7/162 (2013.01); G03F 7/30 (2013.01); H01L 21/32139 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H05B 3/22 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01);
Abstract

A temperature controlling apparatus includes a platen, a first and a second conduits, and a first and a second outlet thermal sensors. The first conduit includes a first inlet, a first outlet, and a first heater. A first fluid enters the first inlet and exits the first outlet, the first heater heats the first fluid to a first heating temperature, and the first fluid is dispensed on the platen. The second conduit includes a second inlet, a second outlet, and a second heater. A second fluid enters the second inlet and exits the second outlet, the second heater heats the second fluid to a second heating temperature, and the second fluid is dispensed on the platen. The first and the second outlet thermal sensors are respectively disposed at the first and the second outlets to sense temperatures of the first and the second fluid.

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