The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2023
Filed:
May. 23, 2019
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Koshi Onishi, Kawasaki, JP;
KhanhTin Nguyen, Kawasaki, JP;
Masatoshi Arai, Kawasaki, JP;
Yoshitaka Komuro, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Abstract
A resist composition including a compound represented by formula (bd1), a total amount of the acid-generator component and the basic component being 20 to 70 parts by weight, relative to 100 parts by weight of the base material component. In the formula, Rxto Rxrepresents a hydrogen atom or a hydrocarbon group, or two or more of Rxto Rxmay be mutually bonded to form a ring structure; Ryand Ryrepresents a hydrogen atom or a hydrocarbon group, or Ryand Rymay be mutually bonded to form a ring structure; Rzto Rzrepresents a hydrogen atom or a hydrocarbon group, or two or more of Rzto Rzmay be mutually bonded to form a ring structure; provided that at least one of Rxto Rx, Ry, Ryand Rzto Rzhas an anionic group; and Mrepresents an m-valent organic cation).