The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 2023

Filed:

Jul. 01, 2021
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Wen-Jia Hsieh, Changhua County, TW;

Long-Jie Hong, Hsinchu, TW;

Chih-Lin Wang, Hsinchu County, TW;

Kang-Min Kuo, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 29/16 (2006.01); H01L 29/161 (2006.01); H01L 29/45 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/311 (2006.01); H01L 23/485 (2006.01); H01L 21/8238 (2006.01); H01L 29/165 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76831 (2013.01); H01L 21/02063 (2013.01); H01L 21/28518 (2013.01); H01L 21/31105 (2013.01); H01L 21/76814 (2013.01); H01L 21/823871 (2013.01); H01L 23/485 (2013.01); H01L 29/16 (2013.01); H01L 29/161 (2013.01); H01L 29/165 (2013.01); H01L 29/45 (2013.01); H01L 29/66568 (2013.01); H01L 29/66636 (2013.01); H01L 29/78 (2013.01); H01L 29/7848 (2013.01); H01L 21/76805 (2013.01); H01L 21/76855 (2013.01); H01L 23/53223 (2013.01); H01L 23/53238 (2013.01); H01L 23/53266 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A device includes an isolation structure, a source/drain epi-layer, a contact, a first dielectric layer, and a second dielectric layer. The isolation structure is embedded in a substrate. The source/drain epi-layer is embedded in the substrate and is in contact with the isolation structure. The contact is over the source/drain epi-layer. The first dielectric layer wraps the contact. The second dielectric layer is between the contact and the first dielectric layer. The first and second dielectric layers include different materials, and a portion of the source/drain epi-layer is directly between a bottom portion of the second dielectric layer and a top portion of the isolation structure.


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