The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2023
Filed:
Dec. 14, 2020
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
TOKYO OHKA KOGYO CO., LTD., Kawasaki, JP;
Abstract
A resist composition including a resin component having a constitutional unit derived from a compound represented by General Formula (a01-1) and a constitutional unit derived from a compound represented by General Formula (a02-1), and an acid generator component composed of an anion moiety and a cation moiety. In General Formula (a01-1), Wrepresents a polymerizable group-containing group, Crepresents a tertiary carbon atom, Rrepresents an unsaturated hydrocarbon group which may have a substituent, Rand Rrepresent a chain saturated hydrocarbon group which may have a substituent, and a carbon atom at an α-position of Cconstitutes a carbon-carbon unsaturated bond. In General Formula (a02-1), Wrepresents a polymerizable group-containing group, Warepresents an aromatic hydrocarbon group, and n2 represents an integer in a range of 1 to 3