Semiconductor structure with air gap and method sealing the air gap

Abstract

The present disclosure provides a method of fabricating a semiconductor structure in accordance with some embodiments. The method includes receiving a substrate having an active region and an isolation region; forming gate stacks on the substrate that extends from the active region to the isolation region; forming an inner gate spacer and an outer gate spacer on sidewalls of the gate stacks; forming an interlevel dielectric (ILD) layer on the substrate; forming a mask layer over the substrate that exposes a portion of the ILD layer and a portion of the outer gate spacer; selectively etching the exposed portion of the outer gate spacer, resulting in an air gap between the inner gate spacer and the ILD layer; and performing an ion implantation process on the exposed portion of the ILD layer to seal the air gap.