The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2023

Filed:

Jul. 09, 2020
Applicant:

Bruker Nano, Inc., Santa Barbara, CA (US);

Inventors:

David Lewis Adler, San Jose, CA (US);

Scott Joseph Jewler, San Jose, CA (US);

Freddie Erich Babian, Palo Alto, CA (US);

Assignee:

Bruker Nano, Inc., Santa Barbara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2022.01); G06T 7/00 (2017.01); G06N 20/00 (2019.01); G06F 30/398 (2020.01); G01N 23/04 (2018.01); G01N 23/083 (2018.01); G01N 23/18 (2018.01); G01T 1/20 (2006.01); G06T 5/00 (2006.01); H01L 21/67 (2006.01); H05K 1/11 (2006.01); H05K 3/40 (2006.01); G06F 18/24 (2023.01); G06F 18/214 (2023.01); G06F 119/18 (2020.01); G06F 115/12 (2020.01);
U.S. Cl.
CPC ...
G06T 7/0014 (2013.01); G01N 23/04 (2013.01); G01N 23/043 (2013.01); G01N 23/083 (2013.01); G01N 23/18 (2013.01); G01T 1/20 (2013.01); G06F 18/214 (2023.01); G06F 18/24 (2023.01); G06F 30/398 (2020.01); G06N 20/00 (2019.01); G06T 5/007 (2013.01); G06T 7/0012 (2013.01); H01L 21/67288 (2013.01); H05K 1/115 (2013.01); H05K 3/4038 (2013.01); G01N 2223/04 (2013.01); G01N 2223/401 (2013.01); G01N 2223/426 (2013.01); G01N 2223/505 (2013.01); G01N 2223/6466 (2013.01); G06F 2115/12 (2020.01); G06F 2119/18 (2020.01); G06T 2207/10081 (2013.01); G06T 2207/10116 (2013.01); G06T 2207/20024 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/20208 (2013.01); G06T 2207/30004 (2013.01);
Abstract

In one embodiment, an automated high-speed X-ray inspection system may generate a first X-ray image of an inspected sample at a first direction substantially orthogonal to a plane of the inspected sample. The first X-ray image may be a high-resolution grayscale image. The system may identify one or more elements of interest of the inspected sample based on the first X-ray image. The first X-ray image may include interfering elements that interfere with the one or more elements of interest in the first X-ray image. The system may determine one or more first features associated with respective elements of interest based on variations of grayscale values in the first X-ray images. The system may determine whether one or more defects are associated with the respective elements of interest based on the one or more first features associated with the element of interest.


Find Patent Forward Citations

Loading…