The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2023
Filed:
Jan. 09, 2020
Asml Netherlands B.v., Veldhoven, NL;
Arnaud Hubaux, Erpent, BE;
Johan Franciscus Maria Beckers, Veldhoven, NL;
Dylan John David Davies, Heeswijk-Dinter, NL;
Johan Gertrudis Cornelis Kunnen, Weert, NL;
Willem Richard Pongers, Eindhoven, NL;
Ajinkya Ravindra Daware, Eindhoven, NL;
Chung-Hsun Li, Eindhoven, NL;
Georgios Tsirogiannis, Eindhoven, NL;
Hendrik Cornelis Anton Borger, Eindhoven, NL;
Frederik Eduard De Jong, Veldhoven, NL;
Juan Manuel Gonzalez Huesca, Eindhoven, NL;
Andriy Hlod, Eindhoven, NL;
Maxim Pisarenco, Son en Breugel, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.