The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2023
Filed:
Feb. 01, 2022
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Naoki Shimomura, Tokyo, JP;
Mizuki Nagai, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25D 17/06 (2006.01); H01L 21/288 (2006.01); C25D 17/00 (2006.01);
U.S. Cl.
CPC ...
C25D 17/008 (2013.01); C25D 17/001 (2013.01); C25D 17/007 (2013.01); C25D 17/06 (2013.01); H01L 21/2885 (2013.01);
Abstract
To partially or locally control a plating film thickness on a polygonal substrate. There is provided a regulation plate for adjusting a current between an anode and the polygonal substrate. This regulation plate includes a main body that has an edge forming a polygonal opening through which the current passes and an attachable/detachable shielding member to shield at least a part of the polygonal opening.