The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Jan. 06, 2022
Tokyo Electron Limited, Tokyo, JP;
Lars Liebmann, Mechanicville, NY (US);
Jeffrey Smith, Clifton Park, NY (US);
Anton J. deVilliers, Clifton Park, NY (US);
Kandabara Tapily, Mechanicville, NY (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
In method for forming a semiconductor device, a first opening is formed in a dielectric stack that has a cylinder shape with a first sidewall. A first conductive layer is deposited along the first sidewall of the first opening and a first insulating layer is deposited along an inner sidewall of the first conductive layer. The dielectric stack is then etched along an inner sidewall of the first insulating layer so as to form a second opening that extends into the dielectric stack with a second sidewall. A second conductive layer is further formed along the second sidewall of the second opening and a second insulating layer is formed along an inner sidewall of the second conductive layer. A bottom of the second conductive layer is positioned below a bottom of the first conductive layer to form a staggered configuration.