The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Jul. 21, 2020
Kla Corporation, Milpitas, CA (US);
Martin Plihal, Pleasanton, CA (US);
Saravanan Paramasivam, Chennai, IN;
Jacob George, Cochin, IN;
Niveditha Lakshmi Narasimhan, Chennai, IN;
Sairam Ravu, Chennai, IN;
Somesh Challapalli, Hyderabad, IN;
Prasanti Uppaluri, Saratoga, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A system for characterizing a specimen is disclosed. In one embodiment, the system includes a characterization sub-system configured to acquire one or more images a specimen, and a controller communicatively coupled to the characterization sub-system. The controller may be configured to: receive from the characterization sub-system one or more training images of one or more defects of a training specimen; generate one or more augmented images of the one or more defects of the training specimen; generate a machine learning classifier based on the one or more augmented images of the one or more defects of the training specimen; receive from the characterization sub-system one or more target images of one or more target features of a target specimen; and determine one or more defects of the one or more target features with the machine learning classifier.