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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11674053 B1

PDFFull Text
Date of Patent:
Jun. 13, 2023

Filed:

Sep. 16, 2014

Composition for forming underlayer film of self-assembled film including aliphatic polycyclic structure

Applicant:

Nissan Chemical Industries, Ltd., Tokyo, JP;

Inventors:

Takafumi Endo, Toyama, JP;

Yasunobu Someya, Toyama, JP;

Hiroyuki Wakayama, Toyama, JP;

Rikimaru Sakamoto, Toyama, JP;

Assignee:

NISSAN CHEMICAL INDUSTRIES, LTD., Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Satya B Sastri

Int. Cl.
CPC ...
C09D 165/00 (2006.01); C09D 5/00 (2006.01); C09D 201/02 (2006.01); C08L 101/02 (2006.01); C09J 133/06 (2006.01); G03F 7/00 (2006.01); C09D 145/00 (2006.01); G03F 7/11 (2006.01); G03F 7/09 (2006.01); B05D 1/38 (2006.01); B05D 3/02 (2006.01); B05D 1/18 (2006.01); B05D 7/00 (2006.01); C09D 201/00 (2006.01); C08G 83/00 (2006.01);
U.S. Cl.
CPC ...
C09D 165/00 (2013.01); B05D 1/38 (2013.01); B05D 3/0254 (2013.01); C08L 101/02 (2013.01); C09D 5/00 (2013.01); C09D 145/00 (2013.01); C09D 201/00 (2013.01); C09D 201/02 (2013.01); C09J 133/066 (2013.01); G03F 7/0002 (2013.01); G03F 7/091 (2013.01); G03F 7/11 (2013.01); B05D 1/185 (2013.01); B05D 7/52 (2013.01); C08G 83/008 (2013.01); C08G 2261/148 (2013.01); C08G 2261/1422 (2013.01); C08G 2261/1426 (2013.01); C08G 2261/312 (2013.01); C08G 2261/3142 (2013.01); C08G 2261/3162 (2013.01); C08G 2261/3241 (2013.01); C08G 2261/3246 (2013.01); C08G 2261/3325 (2013.01);
Abstract

A composition for forming an underlayer film necessary for facilitating alignment of self-assembled film into desired vertical pattern. Composition for forming an underlayer film of self-assembled film including a polymer having unit structure containing aliphatic polycyclic structure of aliphatic polycyclic compound in main chain. The polymer is a polymer having unit structure containing aliphatic polycyclic structure of aliphatic polycyclic compound with aromatic ring structure of aromatic ring-containing compound or polymer chain derived from vinyl group of vinyl group-containing compound in main chain. The polymer has unit structure of Formula (1):X—Y  Formula (1)wherein X is single bond, divalent group having vinyl structure as polymer chain, or divalent group having aromatic ring-containing structure as polymer chain, and Y is divalent group having aliphatic polycyclic structure as polymer chain. The aliphatic polycyclic compound is bi- to hexa-cyclic diene compound. The aliphatic polycyclic compound is dicyclopentadiene or norbornadiene.

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