The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Mar. 19, 2021
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Katsuhide Watanabe, Tokyo, JP;
Itsuki Kobata, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 37/10 (2012.01); B24B 49/04 (2006.01); B24B 37/32 (2012.01); B24B 37/013 (2012.01);
U.S. Cl.
CPC ...
B24B 37/105 (2013.01); B24B 37/013 (2013.01); B24B 37/32 (2013.01); B24B 49/04 (2013.01);
Abstract
A polishing head system capable of precisely controlling a pressing force of a retainer member, such as a retainer ring, against a polishing pad. The polishing head system includes: a polishing head including an actuator configured to apply a pressing force to the workpiece, a retainer member arranged outside the actuator, and piezoelectric elements coupled to the retainer member; and a drive-voltage application device configured to apply voltages independently to the piezoelectric elements.