The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Nov. 22, 2019
Asml Netherlands B.v., Veldhoven, NL;
Andrey Nikipelov, Eindhoven, NL;
Dmitry Kurilovich, Hertogenbosch, NL;
Fabio Sbrizzai, Heeze, NL;
Marcus Adrianus Van de Kerkhof, Helmond, NL;
Ties Wouter Van der Woord, Eindhoven, NL;
Willem Joan Van der Zande, Bussum, NL;
Jeroen Van Duivenbode, Veldhoven, NL;
David Ferdinand Vles, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A membrane cleaning apparatus for removing particles from a membrane, the apparatus including a membrane support and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may include: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.