The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2023

Filed:

Apr. 20, 2021
Applicant:

Hangzhou Silicon-magic Semiconductor Technology Co., Ltd., Hangzhou, CN;

Inventors:

Jiakun Wang, Hangzhou, CN;

Hui Chen, Hangzhou, CN;

Bing Wu, Hangzhou, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/16 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02271 (2013.01); H01L 21/0223 (2013.01); H01L 21/02592 (2013.01); H01L 21/02595 (2013.01); H01L 21/823468 (2013.01); H01L 29/1608 (2013.01);
Abstract

A method of making a silicon carbide MOSFET device can include: providing a substrate with a first doping type; forming a patterned first barrier layer on a first surface of the substrate; forming a source region with a first doping type in the substrate; forming a base region with a second doping type and a contact region with a second doping type in the substrate, and forming a gate structure. The first barrier layer can include a first portion and a second portion, the first portion can include a semiconductor layer and a removable layer different from the semiconductor layer, and the second portion can only include the removable layer.


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