The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 06, 2023

Filed:

Sep. 03, 2020
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventors:

Jun Watanabe, Fujisawa Kanagawa, JP;

Anupam Mitra, Yokohama Kanagawa, JP;

Kazuya Fukuhara, Tokyo, JP;

Assignee:

KIOXIA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); H01L 21/027 (2006.01); B29C 59/02 (2006.01); B29C 35/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 35/0805 (2013.01); B29C 59/02 (2013.01); G03F 7/001 (2013.01); G03F 7/70625 (2013.01); G03F 9/7042 (2013.01); G03F 9/7046 (2013.01); H01L 21/0277 (2013.01); B29C 2035/0827 (2013.01);
Abstract

A template includes: a base material having a surface including a first pattern, a second pattern and a third pattern, the first pattern including a first recess, the second pattern including a second recess. The base material containing a first material having a first refractive index; a first layer disposed in the first recess and containing a second material, the second material having a second refractive index different from the first refractive index; and a second layer disposed in the second recess, containing the second material, and being thicker than the first layer.


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