The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Dec. 22, 2016
Asml Netherlands B.v., Veldhoven, NL;
Andre Bernardus Jeunink, Bergeijk, NL;
Robby Franciscus Josephus Martens, Eindhoven, NL;
Youssef Karel Maria De Vos, Lille, BE;
Ringo Petrus Cornelis Van Dorst, Eindhoven, NL;
Gerhard Albert Ten Brinke, Eindhoven, NL;
Dirk Jerome Andre Senden, Eindhoven, NL;
Coen Hubertus Matheus Baltis, Eindhoven, NL;
Justin Johannes Hermanus Gerritzen, Eindhoven, NL;
Jelmer Mattheüs Kamminga, Tilburg, NL;
Evelyn Wallis Pacitti, Eindhoven, NL;
Thomas Poiesz, Veldhoven, NL;
Arie Cornelis Scheiberlich, Veldhoven, NL;
Bert Dirk Scholten, Best, NL;
André Schreuder, Eindhoven, NL;
Abraham Alexander Soethoudt, Eindhoven, NL;
Siegfried Alexander Tromp, Wessel, NL;
Yuri Johannes Gabriël Van De Vijver, Best, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method for unloading a substrate from a support table configured to support the substrate, the method including: supplying gas to a gap between a base surface of the support table and the substrate via a plurality of gas flow openings in the support table, wherein during an initial phase of unloading the gas is supplied through at least one gas flow opening in an outer region of the support table and not through any gas flow opening in a central region of the support table radially inward of the outer region, and during a subsequent phase of unloading the gas is supplied through at least one gas flow opening in the outer region and at least one gas flow opening in the central region.