The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Sep. 14, 2018
Applicant:
Asml Holding N.v., Veldhoven, NL;
Inventors:
Parag Vinayak Kelkar, Danbury, CT (US);
Justin Lloyd Kreuzer, Trumbull, CT (US);
Assignee:
ASML Holding N.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/06 (2006.01); G02B 5/30 (2006.01); G02B 27/28 (2006.01); G03F 7/20 (2006.01); G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
G01B 11/0658 (2013.01); G01B 11/24 (2013.01); G02B 5/3041 (2013.01); G02B 27/283 (2013.01); G03F 7/70616 (2013.01); G03F 7/70625 (2013.01); G03F 7/70641 (2013.01); G01B 2210/56 (2013.01);
Abstract
An inspection apparatus, including: an optical system configured to provide a beam of radiation to a surface to be measured and to receive redirected radiation from the surface; and a detection system configured to measure the redirected radiation, wherein the optical system includes an optical element to process the radiation, the optical element including a Mac Neille-type multilayer polarizing coating configured to produce a reduced chromatic offset of the radiation.