The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Jul. 15, 2019
Huazhong University of Science and Technology, Hubei, CN;
Honggang Gu, Hubei, CN;
Shiyuan Liu, Hubei, CN;
Simin Zhu, Hubei, CN;
Baokun Song, Hubei, CN;
Hao Jiang, Hubei, CN;
Xiuguo Chen, Hubei, CN;
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY, Hubei, CN;
Abstract
The invention discloses a rapid measurement method for an ultra-thin film optical constant, which includes following steps: S: using a p-light amplitude reflection coefficient rand an s-light amplitude reflection coefficient rof an incident light irradiating to an ultra-thin film to be measured to express an amplitude reflection coefficient ratio ρ of the ultra-thin film: S: performing a second-order Taylor expansion to at d=0 while taking 2πd/λ as a variable to obtain a second-order approximation form; S: performing merging, simplifying and substituting processing to the second-order approximation form for transforming the same into a one-variable quartic equation; S: solving the one-variable quartic equation to obtain a plurality of solutions of the optical constant of the ultra-thin film, and obtaining a correct solution through conditional judgment, so as to achieve the rapid measurement for the ultra-thin film optical constant.