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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11646209 B1

PDFFull Text
Date of Patent:
May. 09, 2023

Filed:

Sep. 17, 2021

Method of cleaning wafer and wafer with reduced impurities

Applicant:

Senic Inc., Cheonan-si, KR;

Inventors:

Jong Hwi Park, Suwon-si, KR;

Il Hwan Yoo, Suwon-si, KR;

Kap-Ryeol Ku, Suwon-si, KR;

Jung-Gyu Kim, Suwon-si, KR;

Jung Woo Choi, Suwon-si, KR;

Eun Su Yang, Suwon-si, KR;

Byung Kyu Jang, Suwon-si, KR;

Sang Ki Ko, Suwon-si, KR;

Assignee:

SENIC INC., Cheonan-si, KR;

Attorney:

NSIP Law

Primary Examiner:

Igwe U Anya

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01L 21/04 (2006.01); H01L 29/16 (2006.01); H01L 29/78 (2006.01); C30B 29/36 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67046 (2013.01); H01L 21/02057 (2013.01); H01L 21/02167 (2013.01); H01L 21/0445 (2013.01); H01L 29/1608 (2013.01); H01L 29/7813 (2013.01); C30B 29/36 (2013.01);
Abstract

A method of cleaning a wafer comprises: a scrubbing operation comprising treating a target wafer to be cleaned with a brush at a rotation rate of 200 rpm or less to prepare a brush cleaned wafer; and a cleaning operation comprising cleaning the brush cleaned wafer with a cleaning solution to prepare a cleaned bare wafer, wherein the cleaning operation comprises a first cleaning operation and a second cleaning operation sequentially.

Find Patent Forward Citations

Park, Jong. (2023). Method of cleaning wafer and wafer with reduced impurities (U.S. Patent No. 11646209). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11646209

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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