The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2023

Filed:

Sep. 09, 2020
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Kaiming Luo, Singapore, SG;

Sarfraz Qureshi, Singapore, SG;

Md Zakir Ullah, Singapore, SG;

Jessica Jing Wen Low, Singapore, SG;

Harsh Narendrakumar Jain, Boise, ID (US);

Kok Siak Tang, Singapore, SG;

Indra V. Chary, Boise, ID (US);

Matthew J. King, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11521 (2017.01); H01L 27/11582 (2017.01); H01L 27/11556 (2017.01); H01L 27/11568 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 27/11521 (2013.01); H01L 27/11556 (2013.01); H01L 27/11568 (2013.01);
Abstract

Microelectronic devices include a stack structure with a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A series of slit structures extends through the stack structure and divides the stack structure into a series of blocks. In a progressed portion of the series of blocks, each block comprises an array of pillars extending through the stack structure of the block. Also, each block—in the progressed portion—has a different block width than a block width of a neighboring block of the progressed portion of the series of blocks. At least one pillar, of the pillars of the array of pillars in the progressed portion, exhibits bending. Related methods and electronic systems are also disclosed.


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