The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2023

Filed:

May. 13, 2021
Applicants:

Nuflare Technology, Inc., Kanagawa, JP;

Nuflare Technology America, Inc., Sunnyvale, CA (US);

Inventor:

Victor Katsap, Hopewell Junction, NY (US);

Assignees:

NuFlare Technology, Inc., Kanagawa, JP;

NuFlare Technology America, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/12 (2006.01); G01N 23/2251 (2018.01); H01J 37/073 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G01N 23/2251 (2013.01); H01J 37/073 (2013.01); H01J 37/12 (2013.01); H01J 37/224 (2013.01); H01J 37/263 (2013.01); G01N 2223/20 (2013.01); G01N 2223/401 (2013.01); G01N 2223/418 (2013.01); H01J 2237/06316 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/282 (2013.01);
Abstract

The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.


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