The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Jun. 17, 2021
Asml Netherlands B.v., Veldhoven, NL;
Jan-Gerard Cornelis Van Der Toorn, Eindhoven, NL;
Jeroen Gertruda Antonius Huinck, Eindhoven, NL;
Han Willem Hendrik Severt, Beek en Donk, NL;
Allard Eelco Kooiker, Waalre, NL;
Michaël Johannes Christiaan Ronde, Berghem, NL;
Arno Maria Wellink, Veldhoven, NL;
Shibing Liu, San Jose, CA (US);
Ying Luo, San Jose, CA (US);
Yixiang Wang, Fremont, CA (US);
Chia-Yao Chen, San Jose, CA (US);
Bohang Zhu, San Jose, CA (US);
Jurgen Van Soest, Amersfoort, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.