The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Jan. 14, 2022
Applicant:
Disco Corporation, Tokyo, JP;
Inventors:
Senichi Ryo, Tokyo, JP;
Yukinobu Ohura, Tokyo, JP;
Hiroto Yoshida, Tokyo, JP;
Tomoaki Endo, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 23/544 (2006.01); H01L 21/268 (2006.01); H01L 21/78 (2006.01); B23K 26/00 (2014.01); B23K 26/402 (2014.01); H01L 21/02 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); B23K 26/009 (2013.01); B23K 26/402 (2013.01); H01L 21/02076 (2013.01); H01L 21/268 (2013.01); H01L 21/78 (2013.01); H01L 23/544 (2013.01); B23K 2103/56 (2018.08); H01L 2221/68327 (2013.01); H01L 2223/5446 (2013.01);
Abstract
A manufacturing method of a protective film agent for laser dicing that includes a solution preparation step of preparing a solution in which at least a water-soluble resin, an organic solvent, and an ultraviolet absorber are mixed; and an ion-exchange treatment step of carrying out ion exchange of sodium ions in the solution by using a cation-exchange resin.