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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11637028 B1

PDFFull Text
Date of Patent:
Apr. 25, 2023

Filed:

Mar. 31, 2021

Method and apparatus for use in wafer processing

Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Thomas Fischer, Villach, AT;

Gerald Lackner, Arnoldstein, AT;

Walter Horst Leitgeb, Wernberg, AT;

Michael Lecher, Villach, AT;

Assignee:

INFINEON TECHNOLOGIES AG, Neubiberg, DE;

Attorney:

Slater Matsil, LLP

Primary Examiner:

Julia Slutsker

Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01B 11/27 (2006.01); H01L 21/68 (2006.01); H01L 21/78 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); G01B 11/272 (2013.01); H01L 21/681 (2013.01); H01L 21/78 (2013.01); H01L 22/20 (2013.01); H01L 21/67092 (2013.01);
Abstract

In an embodiment an apparatus includes a receptacle configured to receive a wafer, a light port configured to emit light from a source of light so as to shine the light on an edge of the wafer, wherein the light port is an opening located on a surface of the receptacle and a light sensitive element configured to receive light that passed the edge of the wafer and to form a detection signal based on the received light, wherein the light port is located underneath the wafer.

Find Patent Forward Citations

Fischer, Thomas. (2023). Method and apparatus for use in wafer processing (U.S. Patent No. 11637028). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11637028

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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