The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Dec. 28, 2021
Applicant:
Gelest, Inc., Morrisville, PA (US);
Inventors:
Barry C. Arkles, Pipersville, PA (US);
Alain E. Kaloyeros, Slingerlands, NY (US);
Assignee:
GELEST, INC., Morrisville, PA (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/24 (2006.01); C23C 16/16 (2006.01); C23C 16/448 (2006.01); C23C 16/452 (2006.01); C23C 16/455 (2006.01); C30B 23/02 (2006.01); C30B 25/02 (2006.01); C30B 29/02 (2006.01); C30B 29/06 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C23C 16/24 (2013.01); C23C 16/16 (2013.01); C23C 16/4488 (2013.01); C23C 16/452 (2013.01); C23C 16/45553 (2013.01); C30B 23/02 (2013.01); C30B 25/02 (2013.01); C30B 29/02 (2013.01); C30B 29/06 (2013.01); H01L 21/28525 (2013.01); H01L 21/28568 (2013.01);
Abstract
A method for deposition of a thin film onto a substrate is provided. The method includes providing a source precursor containing on or more of elements constituting the thin film, generating a transient species from the source precursor, and depositing a thin film onto the substrate from the transient species. The transient species being a reactive intermediate that has a limited lifetime in a condensed phase at or above room temperature.