The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Aug. 13, 2020
Applicant:
Ta Liang Technology Co., Ltd., Taoyuan, TW;
Inventors:
Chao-Chang Chen, Taoyuan, TW;
Jian-Shian Lin, Taoyuan, TW;
Chun-Chen Chen, Taoyuan, TW;
Jen-Chien Li, Taoyuan, TW;
Hsien-Ming Lee, Taoyuan, TW;
Ching-Tang Hsueh, Taoyuan, TW;
Assignee:
TA LIANG TECHNOLOGY CO., LTD., Taoyuan, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 53/017 (2012.01); B24B 49/00 (2012.01); B24B 37/20 (2012.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01); B24B 37/20 (2013.01); B24B 49/00 (2013.01);
Abstract
A method for repairing a polishing pad in real time includes a trimming step, a detection step, and a reconstruction and analysis step. A surface morphology of the polishing pad is reconstructed through detection, and analysis is performed according to the reconstruction, to ensure that a surface of the polishing pad can recover its function after the surface of the polishing pad is trimmed, so that the polishing pad can be used effectively to reduce costs.