The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2023
Filed:
Aug. 20, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Bon-Woong Koo, Andover, MA (US);
Frank Sinclair, Boston, MA (US);
Alexandre Likhanskii, Malden, MA (US);
Svetlana Radovanov, Brookline, MA (US);
Alexander Perel, Danvers, MA (US);
Graham Wright, Gloucester, MA (US);
Jay T. Scheuer, Rowley, MA (US);
Daniel Tieger, Manchester, MA (US);
You Chia Li, Reading, MA (US);
Jay Johnson, Gloucester, MA (US);
Tseh-Jen Hsieh, Rowley, MA (US);
Ronald Johnson, Gloucester, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An ion source including a chamber housing defining an ion source chamber and including an extraction plate on a front side thereof, the extraction plate having an extraction aperture formed therein, and a tubular cathode disposed within the ion source chamber and having an opening formed in a front half thereof nearest the extraction aperture, wherein a rear half of the tubular cathode furthest from the extraction aperture is closed.