The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2023
Filed:
Feb. 22, 2018
Asml Netherlands B.v., Veldhoven, NL;
Sietse Thijmen Van Der Post, Utrecht, NL;
Sander Bas Roobol, Veldhoven, NL;
Pavel Evtushenko, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source arrangement causes interaction between pump radiation () and a gaseous medium () to generate EUV or soft x-ray radiation by higher harmonic generation (HHG). The operating condition of the radiation source arrangement is monitored by detecting () third radiation () resulting from an interaction between condition sensing radiation and the medium. The condition sensing radiation () may be the same as the first radiation or it may be separately applied. The third radiation may be for example a portion of the condition sensing radiation that is reflected or scattered by a vacuum-gas boundary, or it may be lower harmonics of the HHG process, or fluorescence, or scattered. The sensor may include one or more image detectors so that spatial distribution of intensity and/or the angular distribution of the third radiation may be analyzed. Feedback control based on the determined operating condition stabilizes operation of the HHG source.