The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2023
Filed:
Jul. 30, 2019
Applicants:
Nuflare Technology, Inc., Yokohama, JP;
Nuflare Technology America, Inc., Sunnyvale, CA (US);
Inventor:
John Hartley, Stormville, NY (US);
Assignees:
NuFlare Technology, Inc., Yokohama, JP;
NuFlare Technology America, Inc., Sunnyvale, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G06T 7/00 (2017.01); H01L 21/67 (2006.01); H01J 37/09 (2006.01); H01J 37/141 (2006.01); H01J 37/244 (2006.01); H01J 37/04 (2006.01); G01N 21/95 (2006.01); G01N 21/956 (2006.01); H01J 37/05 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G01N 21/9501 (2013.01); G01N 21/95607 (2013.01); G06T 7/001 (2013.01); H01J 37/045 (2013.01); H01J 37/05 (2013.01); H01J 37/09 (2013.01); H01J 37/141 (2013.01); H01J 37/244 (2013.01); H01L 21/67288 (2013.01); G06T 2207/30148 (2013.01); H01J 2237/24592 (2013.01);
Abstract
An electron optical system includes an electromagnetic lens configured to include a yoke, and refract an electron beam passing through the yoke by generating a magnetic field, and a shield coil disposed along the inner wall of the yoke, and configured to reduce a leakage magnetic field generated by the electromagnetic lens.