The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2023
Filed:
Dec. 20, 2019
Nuflare Technology, Inc., Kanagawa, JP;
Nuflare Technology America, Inc., Sunnyvale, CA (US);
John Hartley, Hopewell Junction, NY (US);
Victor Katsap, Hopewell Junction, NY (US);
NuFlare Technology, Inc., Kanagawa, JP;
NuFlare Technology America, Inc., Sunnyvale, CA (US);
Abstract
A thermal field emitter, an apparatus, and a method for generating multiple beams for an e-beam tool are provided. The thermal field emitter includes an electron emitting portion configured to emit an electron beam and a nano-aperture array (NAA) having a plurality of openings. The NAA is positioned in a path of the electron beam. The NAA is configured to form multiple beams. The multiple beams include electrons from the electron beam that pass through the plurality of openings.