The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2023
Filed:
Oct. 06, 2020
Pdf Solutions, Inc., Santa Clara, CA (US);
Richard Burch, McKinney, TX (US);
Jeffrey D. David, San Jose, CA (US);
Qing Zhu, Rowlett, TX (US);
Tomonori Honda, Santa Clara, CA (US);
Lin Lee Cheong, San Jose, CA (US);
PDF Solutions, Inc., Santa Clara, CA (US);
Abstract
Scheme for detection and classification of semiconductor equipment faults. Sensor traces are monitored and processed to separate known abnormal operating conditions from unknown abnormal operating conditions. Feature engineering permits focus on relevant traces for a targeted feature. A machine learning model is built to detect and classify based on an initial classification set of anomalies. The machine learning model is continuously updated as more traces are processed and learned.